Precise Re-location of Radioactive Particles in SEM/SIMS Analysis of Environmental Samples

Elemental and isotopic analysis of individual radioactive particles in the µm-size range requires the ability to precisely re-locate particles-of-interest (POIs) in the SIMS, after being located and identified in the SEM. This paper describes the development, implementation, and evaluation of the triangulation method for re-locating particles. In SEM to SEM re-location experiments relocation error of less than 3µm is obtainable, and in SEM to SIMS experiments - less than 10µm. The method is fast, easy to apply, low-cost and facilitates repeated analyses of particles in different instruments.